Vertical Mini-Batch Furnace "VF-3000"
Vertical furnace with automatic transport compatible with Φ200mm wafers, usable from R&D to mass production.
The "VF-3000" is a mini-batch vertical furnace that achieves low costs suitable for downstream users. It is capable of processing mini-batches of 50 to 75 wafers and accommodates a wide range of wafer sizes up to Φ200mm. It allows for ultra-high temperature processing, making it suitable for power device manufacturing and VCSEL vertical thermal processing systems. 【Features】 - Capable of selecting mini-batch processing of 50 to 75 wafers, suitable for both R&D and mass production lines - Accommodates a wide range of wafer sizes up to Φ200mm - Maximum of 4 cassette stockers - Equipped with LGO heaters, demonstrating excellent temperature characteristics from low to medium-high temperatures - High-speed wafer transport using a single wafer handling robot *For more details, please refer to the PDF document or feel free to contact us.
- Company：ジェイテクトサーモシステム
- Price：Other
